哪位达人可以告知zygo上的PV, RMS, PWR, IRR分别是什么?

dodgygeezer

哪位达人可以告知zygo上的PV, RMS, PWR, IRR分别是什么? 哪个代表面型精度中的1/4 lambda? 谢谢.

pand2008

PV峰谷值 RMS整个面型峰谷的均方根 PWR 光圈 IRR 面型不规则度
PV (Peak-to-Valley) is the distance
between the highest and lowest points
within the sample.
RMS
Root-Mean-Square or rms is the root-meansquare
deviation from the center line. This is a
method of calculating an average by squaring
each value and then taking the square root of the
mean.

IRR
Irregularity (IRR) is the tolerance of the surface form error which remains after the
sagitta error is removed. It is the PV with respect to the best fit reference sphere. Part of
the ISO figure specification (ISO 10110-5).

pand2008

我手上有ZYGO 干涉仪的资料和说明书，感兴趣的话可以咨询。 我们公司有4台干涉仪

maplefeng

以上内容有了基本了解，不过在实际测量中，他们之间是否有一定的对应关系。以及对产品的N，dN值之间又是什么样的关系呢。谢谢各位

yangshaojun

谁有ZYGO 干涉仪的相关资料传一点上来呀