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发表于 2009-8-5 13:54:13
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Motorized Six-Axis Tilt Aligner Model 8095
These multi-axis positioners increase the utility of our popular kinematic stages by motorizing each of the axes. The addition of Picomotor™ actuators to each stage allows remote high-resolution (<30-nm) adjustment of various combinations of X, Y, Z, Θx, and Θy. The Model 8095 six-axis aligner is ideal for semiconductor-wafer alignment.
http://www.newfocus.com/products ... 13&modelId=1607 |
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