Review of Basic Vacuum Calculations

a32574

真空排气计算

Low vacuum 25 to 760 Torr
Medium vacuum 10-3
to 25 Torr
High vacuum 10-6
to 10-3
Torr
Very high vacuum 10-9
to 10-6
Torr
Ultrahigh vacuum 10-12
to 10-9
Torr
Extreme Ultrahigh vacuum below 10-12
Torr

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