基于线阵CCD的激光干涉条纹信号处理系统

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基于线阵CCD的激光干涉条纹信号处理系统
Signal Processing System of Laser Interference Fringe Based on Linear CCD
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作　　者：崔岩 吴国兴 顾媛媛 陆惠 殷美琳
CUI Yan, WU Guo-xing, GU Yuan-yuan, LU Hui, YIN Mei-lin （ Section of Practice and Training, Tianhua College, Shanghai Normal University, Shanghai 201815, China）
机构地区：上海师范大学天华学院实习实训处,上海201815
出　　处：《测控技术》 CSCD 2014年第33卷第7期 43-45页,共3页
Measurement ＆ Control Technology
基　　金：上海高校青年教师培养资助计划（ZZTH12010）
摘　　要：激光干涉测量系统在非接触精密测量领域占有重要地位,其中对干涉条纹的测量是激光干涉测量的核心。针对这种情况,提出利用线阵CCD将激光垂直照射在劈尖表面时所产成的干涉条纹光学图像转换成电信号并转移输出,通过视频信号预处理电路,模数转换后得到关于干涉条纹宽度的方度信号,完成了对CCD输出干涉条纹信号的处理,实现了对等间距干涉条纹的自动检测。
Laser interference instrument is very important in uncontacted precision measurement field,the measurement of interference fringes is the key in laser interferometry.To deal with this problem,a linear CCD is used to induce the interference fringes and output electric signal when laser is shining optical wedge vertically,then the signal is preprocessed and transformed into square-wave signal which contain fringe width information.Signal processing from the output image signal of CCD is accomplished.The auto-testing for equally spaced interference fringes is realized.
关键词：线阵CCD 非接触测量 激光干涉 条纹宽度
linear CCD ;non-contact measurement ;laser interference ;fringe width ;