高体分铝基碳化硅表面镀镍钴合金非球面反射镜的光学加工

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高体分铝基碳化硅表面镀镍钴合金非球面反射镜的光学加工
Optical Fabrication on High Volume Fraction SiCp/Al Coating Nikel-Cobalt Alloy Paraboloid Mirror
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作　　者：范镝
Fan Di （Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Acadmy of Sciences, Changchun, Jilin 130033, China）
机构地区：中国科学院长春光学精密机械与物理研究所光学系统先进制造技术重点实验室,吉林长春130033
出　　处：《激光与光电子学进展》 CSCD 2014年第51卷第8期 150-153页,共4页
Laser ＆ Optoelectronics Progress
摘　　要：为了制造具有良好力学和热学性能的反射镜，对高体分铝基碳化硅镀镍钻合金反射镜的光学加工进行了研究；介绍了高体分铝基碳化硅SiCp／A1的物理性能；采用不同抛光磨料和抛光模对SiCp／Al镀镍钴合金样片进行抛光实验；在实验基础上，对SiCp／Al表面镀镍钴合金同轴抛物面反射镜表面进行精密抛光，实现了300mm口径SiCp／Al表面镀镍钻合金同轴抛物面反射镜的光学加工，其面形精度均方根值为0．027λ（λ=632．8nm），表面粗糙度Rn值优于2．1nm。
In order to manufacture mirrors with fine mechanical and thermodynamic properties, the fabrication of high volume fraction SiCp/Al coating nickel- cobalt alloy aspheric mirror is studied; the mechanical and thermodynamic properties of high volume fraction SiCp/Al are introduced; then, several kinds of polish agent and model are used in experiments for polishing SiCp/Al coating nickel-cobalt alloy samples; finally, on the basis of experiments, a φ300 mm high volume fraction SiCp/Al coating nickel-cobalt alloy paraboloid mirror is manufactured. The tested results indicate that surface accuracy of the mirror is 0.027 λ （RMS, λ =632.8 nm）, and the surface roughness is 2.1 nm （Ra）.
关键词：光学加工 高体分铝基碳化硅 镍钴合金 抛物镜
optical fabrication ; high volume fraction SiCp/Al ; nickel-cobalt alloy ; paraboloid mirror ;