矩形离轴非球面反射镜双摆法加工与检测

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矩形离轴非球面反射镜双摆法加工与检测
Manufacturing and testing of rectangular off-axis aspheric mirror with double-swing polishing method
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作　　者：宋淑梅
SONG Shu-mei （ Changchun Institute of Optics, Fine Mechanics and Physics,  Chinese Academy of Sciences, Changchun 130033 ）
机构地区：中国科学院长春光学精密机械与物理研究所,吉林长春130033
出　　处：《中国光学》 2014年第7卷第6期 975-981页,共7页
Chinese Optics and Applied Optics Abstracts
基　　金：“XX-2”技术探索与验证条件建设项目专项计划
摘　　要：介绍了一种轻质矩形离轴非球面反射镜的加工与检测方法。针对矩形离轴非球面镜这种直角效应的加工难点，提出双摆式加工工艺，并设计改造双摆式加工机床使该方法得以实现。采用该方法加工完成某多光谱仪光学系统中4块矩形离轴非球面反射镜（其中最大尺寸为266mm×110mm），最终加工得到的面形精度均优于0．020λ（RMS，@633mm）的设计指标要求。加工结果表明，用该加工技术既提高了光学加工效率又利于得到较为平滑的面形质量。
A kind of manufacturing and testing method for rectangular off-axis aspheric lightweight mirror is in- troduced. In order to overcome the comer effect, double-swing polishing（DSP） method is proposed. A DSP machine is made to achieve satisfying manufacturing result. The DSP and the 4-pole method are successfully applied for manufacturing optical system in the spectrometer. Four rectangular off-axis aspheric mirrors with the largest size of 266 mm× 110 mm are polished, and the final surface precision figures are better than 0. 020λ（RMS, @ 633 nm）. Manufacturing result shows that the double-swing polishing method improves the polishing efficiency and reduces the optical surface medium frequency error.
关键词：光学加工 离轴非球面 双摆法 4测杆法
optical manufacture ; off-axis aspheric surface ; double-swing ;4-pole method ;