Guopt 发表于 2007-4-22 04:12:00

[求助]关于晶振仪

<p>各位大侠：</p><p>小弟试验用的设备配备的还是老式的XTC-2晶振仪，最近一次试验做了几罩之后沉积速率的控制就不准了（非常不准设置为3埃，变化范围-50～80），导致束流变化范围也很大（0-400），晶振片是开始试验的时候清洗的。不知道是什么问题，向各位请教。知道可能原因的还望不吝赐教。在此先谢过啦！</p>

hacker 发表于 2007-4-22 16:37:00

<span lang="ZH-CN" style="FONT-SIZE: 12pt; FONT-FAMILY: SimSun; mso-ascii-font-family: Times New Roman; mso-hansi-font-family: Times New Roman; mso-bidi-font-family: Times New Roman; mso-font-kerning: 1.0pt; mso-ansi-language: EN-US; mso-fareast-language: ZH-CN; mso-bidi-language: AR-SA;">检查或清洁一下电子枪了﹐可能是灯丝弯了或枪太脏了</span>

Guopt 发表于 2007-4-23 21:41:00

<p>谢谢，也有可能。这个枪使用了有一段时间啦！</p><p>为什么电子枪有问题就会影响到晶振仪啊？是打出来的膜料不均匀么？</p><p>电子枪的灯丝能不能清洗啊？我们备用的不多啊!</p>

Leesnow 发表于 2007-4-23 21:52:00

你们用的是什么枪啊，好象是不可以吧！

李伟华 发表于 2007-4-23 23:29:00

<table cellspacing="0" cellpadding="0" width="621" align="left" border="1" style="BORDER-RIGHT: medium none; BORDER-TOP: medium none; BORDER-LEFT: medium none; WIDTH: 466pt; BORDER-BOTTOM: medium none; BORDER-COLLAPSE: collapse; mso-border-alt: solid windowtext .5pt; mso-table-lspace: 9.0pt; mso-table-rspace: 9.0pt; mso-table-anchor-vertical: paragraph; mso-table-anchor-horizontal: margin; mso-table-left: center; mso-table-top: 8.15pt; mso-padding-alt: 0cm 5.4pt 0cm 5.4pt;"><tbody><tr style="HEIGHT: 15pt;"><td width="171" rowspan="6" style="BORDER-RIGHT: windowtext 0.5pt solid; PADDING-RIGHT: 5.4pt; BORDER-TOP: windowtext 0.5pt solid; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; BORDER-LEFT: windowtext 0.5pt solid; WIDTH: 127.95pt; PADDING-TOP: 0cm; BORDER-BOTTOM: windowtext 0.5pt solid; HEIGHT: 15pt; BACKGROUND-COLOR: transparent;"><p class="MsoNormal" align="center" style="MARGIN: 0cm 0cm 0pt; TEXT-ALIGN: center; mso-element: frame; mso-element-frame-hspace: 9.0pt; mso-element-wrap: around; mso-element-anchor-vertical: paragraph; mso-element-anchor-horizontal: margin; mso-element-top: 8.15pt; mso-height-rule: exactly;"><span style="FONT-SIZE: 12pt; FONT-FAMILY: 华文细黑;">蒸发过程中厚度<span lang="EN-US"><p></p></span></span></p><p class="MsoNormal" align="center" style="MARGIN: 0cm 0cm 0pt; TEXT-ALIGN: center; mso-element: frame; mso-element-frame-hspace: 9.0pt; mso-element-wrap: around; mso-element-anchor-vertical: paragraph; mso-element-anchor-horizontal: margin; mso-element-top: 8.15pt; mso-height-rule: exactly;"><span style="FONT-SIZE: 12pt; FONT-FAMILY: 华文细黑;">波动大<span lang="EN-US"><p></p></span></span></p></td><td width="451" style="BORDER-RIGHT: windowtext 0.5pt solid; PADDING-RIGHT: 5.4pt; BORDER-TOP: windowtext 0.5pt solid; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; BORDER-LEFT: #ece9d8; WIDTH: 338.05pt; PADDING-TOP: 0cm; BORDER-BOTTOM: windowtext 0.5pt solid; HEIGHT: 15pt; BACKGROUND-COLOR: transparent; mso-border-left-alt: solid windowtext .5pt;"><p class="MsoNormal" style="MARGIN: 0cm 0cm 0pt; mso-element: frame; mso-element-frame-hspace: 9.0pt; mso-element-wrap: around; mso-element-anchor-vertical: paragraph; mso-element-anchor-horizontal: margin; mso-element-top: 8.15pt; mso-height-rule: exactly;"><span lang="EN-US" style="FONT-SIZE: 12pt; FONT-FAMILY: 华文细黑;">1. 晶片受损<p></p></span></p></td></tr><tr style="HEIGHT: 15pt;"><td width="451" style="BORDER-RIGHT: windowtext 0.5pt solid; PADDING-RIGHT: 5.4pt; BORDER-TOP: #ece9d8; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; BORDER-LEFT: #ece9d8; WIDTH: 338.05pt; PADDING-TOP: 0cm; BORDER-BOTTOM: windowtext 0.5pt solid; HEIGHT: 15pt; BACKGROUND-COLOR: transparent; mso-border-left-alt: solid windowtext .5pt; mso-border-top-alt: solid windowtext .5pt;"><p class="MsoNormal" style="MARGIN: 0cm 0cm 0pt; mso-element: frame; mso-element-frame-hspace: 9.0pt; mso-element-wrap: around; mso-element-anchor-vertical: paragraph; mso-element-anchor-horizontal: margin; mso-element-top: 8.15pt; mso-height-rule: exactly;"><span lang="EN-US" style="FONT-SIZE: 12pt; FONT-FAMILY: 华文细黑;">2. 晶片接近更换寿命<p></p></span></p></td></tr><tr style="HEIGHT: 15pt;"><td width="451" style="BORDER-RIGHT: windowtext 0.5pt solid; PADDING-RIGHT: 5.4pt; BORDER-TOP: #ece9d8; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; BORDER-LEFT: #ece9d8; WIDTH: 338.05pt; PADDING-TOP: 0cm; BORDER-BOTTOM: windowtext 0.5pt solid; HEIGHT: 15pt; BACKGROUND-COLOR: transparent; mso-border-left-alt: solid windowtext .5pt; mso-border-top-alt: solid windowtext .5pt;"><p class="MsoNormal" style="MARGIN: 0cm 0cm 0pt; mso-element: frame; mso-element-frame-hspace: 9.0pt; mso-element-wrap: around; mso-element-anchor-vertical: paragraph; mso-element-anchor-horizontal: margin; mso-element-top: 8.15pt; mso-height-rule: exactly;"><span lang="EN-US" style="FONT-SIZE: 12pt; FONT-FAMILY: 华文细黑;">3. 晶片holder有脏物<p></p></span></p></td></tr><tr style="HEIGHT: 29pt;"><td width="451" style="BORDER-RIGHT: windowtext 0.5pt solid; PADDING-RIGHT: 5.4pt; BORDER-TOP: #ece9d8; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; BORDER-LEFT: #ece9d8; WIDTH: 338.05pt; PADDING-TOP: 0cm; BORDER-BOTTOM: windowtext 0.5pt solid; HEIGHT: 29pt; BACKGROUND-COLOR: transparent; mso-border-left-alt: solid windowtext .5pt; mso-border-top-alt: solid windowtext .5pt;"><p class="MsoNormal" style="MARGIN: 0cm 0cm 0pt; mso-element: frame; mso-element-frame-hspace: 9.0pt; mso-element-wrap: around; mso-element-anchor-vertical: paragraph; mso-element-anchor-horizontal: margin; mso-element-top: 8.15pt; mso-height-rule: exactly;"><span lang="EN-US" style="FONT-SIZE: 12pt; FONT-FAMILY: 华文细黑;">4. 应力产生附着膜层脱落<p></p></span></p></td></tr><tr style="HEIGHT: 29pt;"><td width="451" style="BORDER-RIGHT: windowtext 0.5pt solid; PADDING-RIGHT: 5.4pt; BORDER-TOP: #ece9d8; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; BORDER-LEFT: #ece9d8; WIDTH: 338.05pt; PADDING-TOP: 0cm; BORDER-BOTTOM: windowtext 0.5pt solid; HEIGHT: 29pt; BACKGROUND-COLOR: transparent; mso-border-left-alt: solid windowtext .5pt; mso-border-top-alt: solid windowtext .5pt;"><p class="MsoNormal" style="MARGIN: 0cm 0cm 0pt; mso-element: frame; mso-element-frame-hspace: 9.0pt; mso-element-wrap: around; mso-element-anchor-vertical: paragraph; mso-element-anchor-horizontal: margin; mso-element-top: 8.15pt; mso-height-rule: exactly;"><span lang="EN-US" style="FONT-SIZE: 12pt; FONT-FAMILY: 华文细黑;">5晶片被蒸发源的熔化材料冲击。<p></p></span></p></td></tr><tr style="HEIGHT: 29pt;"><td width="451" style="BORDER-RIGHT: windowtext 0.5pt solid; PADDING-RIGHT: 5.4pt; BORDER-TOP: #ece9d8; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; BORDER-LEFT: #ece9d8; WIDTH: 338.05pt; PADDING-TOP: 0cm; BORDER-BOTTOM: windowtext 0.5pt solid; HEIGHT: 29pt; BACKGROUND-COLOR: transparent; mso-border-left-alt: solid windowtext .5pt; mso-border-top-alt: solid windowtext .5pt;"><p class="MsoNormal" style="MARGIN: 0cm 0cm 0pt; mso-element: frame; mso-element-frame-hspace: 9.0pt; mso-element-wrap: around; mso-element-anchor-vertical: paragraph; mso-element-anchor-horizontal: margin; mso-element-top: 8.15pt; mso-height-rule: exactly;"><span lang="EN-US" style="FONT-SIZE: 12pt; FONT-FAMILY: 华文细黑;">6. 小的磁性物体对探头产生影响<p></p></span></p></td></tr></tbody></table>

小技工 发表于 2007-4-24 18:34:00

赞同版主提供的建议，

putinzhenkong 发表于 2011-9-23 11:42:55

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